MEMS sensors by InCheck
| MEMS accelerometers and temperature sensors
InCheck MEMS Sensors is a series of low power and low cost industrial accelerometers and temperature sensors. Based on MEMS technology, the sensors do not require periodic calibration and are suitable for installation in harsh industrial environments.
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InCheck miniature sensors use MEMS microchip sensing elements sealed in a rugged casing for industrial use. Unlike traditional piezoelectric accelerometers, MEMS sensors can be directly interfaced with standard ADCs without the need for analog signal conditioning.
The MEMS sensing elements have stable characteristics over time and a range of temperatures, eliminating the need for field calibration and allowing for precise measurements. The sensitivity of accelerometers varies within a tight range of ±2%. Such accuracy in not achievable with piezoelectric accelerometers
The low power requirements make it possible to incorporate an optional precision temperature sensing element within the sensor body, creating a dual sensor. The temperature output is linear with an accuracy of ±1°C at 25°C
Since the sensors do not require field calibration and can withstand wide temperature fluctuation (-40 to +125°C) it is easy to have them permanently installed. Click on the Installation tab to learn more about InCheck MEMS Sensors innovative installation methods.

The innovative design of the InCheck MEMS sensors takes advantage of the small size by packaging the whole sensor into a slim cylindrical body. Sensors can have two types of casing in addition to an OEM version that does not have a casing at all.
A sensor with a threaded casing allows easy and removable installation in the field. It installs into a 3/8"-24 or M10x1 hole. A jam nut is used to lock the sensor in position. If drilling is not an option, a mounting nut can be attached on the machine surface with adhesive and the sensor installed into it. For portable data collection the sensor can be used with a mounting magnet.
Embeddable sensors are installed with permanent adhesive. They can be installed into a 5/16" or 8mm diameter hole. Embedding sensors into machine housing solves a number of common problems that arise with externally mounted sensors. Embedded sensors can be positioned closer to the machine bearings, thus providing more accurate data.
InCheck also makes the MEMS sensors available for OEM use – these embeddable sensors do not have a metal casing at all. They are completely encapsulated in hard resin and are designed to be installed into the machine housing by the manufacturer during assembly.
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